KOREAN Home SITE MAP KOREAN ENGLISH
 
   
 
 
HOME>Product>Power Supply>DC/Pulse
 
       
sputtering
Usage

EnerStream, EnerPulse, EnerPulse Duo, PulseGen, PulseGen Duo series are power supplies which are designed to adjust to sputter application. Depending on wave, they are divided into DC a nd Pulse power.
Depending on ca source application, there are Dual Magnetron sputter and Single Magnetron sputter.Big capacity DC power can supply maximum DC 160kW by parallel operation with EnerStream model.

DC Magnetron Sputter : EnerStream series
-Application : Al, Cu, Ti, Cr, Ni, Si, ITO
-Economic model. Applied to low resistive materials such as metal deposition process
Pulsed DC Magnetron Sputter : EnerPulse & PulseGen series
-Application : Al, Cu, Ti, Cr, Ni, Si, ITO, Graphite, TiN,
-High resistive materials can be used such as silicon deposition process
High quality of thin film is enabled
Dual Magnetron Sputter : EnerPulse & PulsGen Duo series

-Coating Application : Al, Cu, Ti, Cr, Ni, Si, ITO, Graphite, TiN
-High resistive materials can be used such as silicon deposition process
-Two different targets can be sputtered with one plasma power supply
-We enable the precise control of critical variables to vary the composition and other characteristics of thin film

Product details
Model Power Specifications Type Remarks
EnerStream 1 1 kW 800V / 2.5A DC TBD
EnerStream 3 3 kW 800V / 7,5 A DC TBD
EnerStream 5 5 kW 800V / 12.5 A , < 0.5mJ/1kW DC  
EnerStream 10 10 kW 800V / 25 A , < 0.5mJ/1kW DC  
EnerStream 15 15 kW 800V / 37.5 A , < 0.5mJ/1kW DC  
EnerStream 20 20 kW 800V / 50A , < 0.5mJ/1kW DC  
EnerPulse 5 5 kW 800V / 12.5A (20~150kHz) Pulse  
EnerPulse 10LF 10 kW 800V / 25A (20~30kHz Pulse  
EnerPulse 10LV 10 kW 650V / 33.3A (20~150kHz) Pulse  
EnerPulse 10 10 kW 800V / 25A (20~150kHz) Pulse  
EnerPulse 10MV 10 kW 1000V / 20A (10~50kHz) Pulse  
EnerPulse 10HV 10 kW 800V / 2.5A Pulse  
PulseGen 20 20 kW 800V / 50A (20~100kHz) Pulse  
PulseGen 40 40 kW 800V / 100A (50~80kHz) Pulse  
EnerPulse 10 Duo 10 kW 800V / 25A (20~50kHz) Pulse  
EnerPulse 20 Duo 20 kW 800V / 2.5A Pulse TBD
EnerPulse 40 Duo 40 kW 800V / 100A (20~50kHz) Pulse TBD
* TBD (To be developed)
 
     
   
webmaster:admin@jytech.net gobizkorea바로가기