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atm. Plasma
Usage
Genius series is a power supply which generates plasma in atmosphere. It improves process effectiveness through high-dense plasma by providing rising-time pulse. Also, it can control frequency widely. It can control plasma density. It help various plasma process.
Depending on electrode forms, Arc Jet (Genius J-500, J-1000) and DBD(Dielectric Barrier Discharge) are uaully used for Genius 2, 6, 10. It is often applied to Cleaning, Surface Treatment, PR Ashing, and Dry Etching.
 
Product details
Model Power Specifications Type Remarks
Genius J-500 500 W 8kV (20~50kHz) , Arc Jet Pulse  
Genius J-1000 1 kW 8kV (20~50kHz) , Arc Jet Pulse  
Genius 2 2 kW 10/12/15kV (20~60kHz) , DBD Quasi-Pulse  
Genius 6 6 kW 10/12/15kV (20~60kHz) , DBD Quasi-Pulse  
Genius 10 10 W 10/12/15kV (20~60kHz) , DBD Quasi-Pulse  
 
 
     
   
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